ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,827, issued on Oct. 20, was assigned to KOREA INSTITUTE OF FUSION ENERGY (Daejeon, South Korea). "Electrode for capacitively coupled plasma... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,828, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Multi-electrode source assembly for plasma processin... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,829, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Systems and methods for extracting process control informati... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,830, issued on Oct. 20, was assigned to SST INC. (Chiba, Japan). "High frequency reaction processing apparatus and high frequency reaction ... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,831, issued on Oct. 20, was assigned to NISSIN ION EQUIPMENT Co. LTD. (Koka-city, Japan). "Ion source and operating method thereof" was inv... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,832, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Multi-location gas injection to improve uniformity in rapid ... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,833, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Plasma chamber with a multiphase rotating gas cross-... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,834, issued on Oct. 20, was assigned to ASM IP Holding B.V. (Almere, Netherlands). "Plasma enhanced epitaxial chemical vapor deposition sys... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,835, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Coated part for plasma processing chamber" was invented by L... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,836, issued on Oct. 20, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea). "Apparatus for treating substrate" was invented by... Read More